基于碳膜的柔性神经微电极阵列加工  

Fabrication of Carbon Film-Based Flexible Neural Microelectrode Array

作　　者：朱壮晖[1,2] 周亮[1,2] 张华[1] 李刚[1] 金庆辉[1] 赵建龙[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感器技术联合国家重点实验室,上海200050 [2]中国科学院研究生院,北京100039

出　　处：《纳米技术与精密工程》2012年第2期184-188,共5页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB707505);国家高技术研究发展计划(863计划)资助项目(2009AA04Z326);国家自然科学基金资助项目(30872629);上海市自然科学基金资助项目(10ZR1436200)

摘　　要：为了实现长期安全有效的神经电刺激,避免电极腐蚀情况,提出了一种基于热解光刻胶形成碳膜作为导电材料的柔性视网膜神经微电极阵列.首先,通过高温热解图形化的光刻胶形成导电碳膜,然后利用光敏性聚酰亚胺(Durimide 7510)作为基底材料,通过光刻结合转膜、键合和牺牲层腐蚀技术,实现了具有柔性特征的碳膜神经微电极阵列.实验结果显示这种碳膜电极的电荷存储能力达到6.625 mC/cm2,是金电极的12.4倍,显示了良好的电化学稳定性和电荷注入能力,有利于其长期植入和安全有效地工作,可应用于新一代人工视网膜系统的构建.To achieve long-term safe and effective stimulation and to avoid erosion of electrodes, a novel flexible retinal stimulation microelectrode array was developed using pyrolyzed photoresist carbon film as a conducting material in this paper. Firstly, the patterned photoresists were pyrolyzed to produce conduc- ting carbon fihns at high temperature. Then, a photosensitive polyimide （Durimide 7510） was used as the substrate material. By patterning with photolithography techniques, sequentially transferring the carbon film, bonding two insulting layers and etching the sacrifice layer, the flexible carbon film microelec- trode arrays were successfully fabricated. Experimental results show that the charge storage capacity of the carbon film microelectrodes is 6. 625 mC/cm2, which is about 12.4 times greater than that of the gold microelectrodes, indicating that the carbon film microelectrodes have a good electrochemical stability and a large charge injection capability, which is beneficial to their long-term implantation and safe work. This flexible carbon film microelectrode array can he a promising candidate for retinal prosthesis.

关 键 词：柔性微电极 碳膜 电化学稳定性 人工视网膜 

分 类 号：R318.08[医药卫生—生物医学工程]