多弧离子镀制备TiN涂层的高温抗氧化性能研究  

Research on High Temperature Oxidation Resistance of TiN Coating by Multi-arc Ion Plating

作　　者：袁琳[1] 高原[1] 张维[1] 王成磊[1] 蔡航伟[1] 马志康[1] 

机构地区：[1]桂林电子科技大学材料科学与工程学院,广西桂林541004

出　　处：《硬质合金》2012年第1期15-18,共4页Cemented Carbides

基　　金：国家自然科学基金项目:50764002;信息材料广西重点实验室主任研究课题;桂科能0710908-06-Z;广西区自然科学基金重点项目:2010GXNSFD013008

摘　　要：在201不锈钢上进行多弧离子镀沉积TiN涂层,研究了TiN涂层在400～800℃间的高温氧化性能。对涂层氧化后的表面形貌、表面成分等进行了研究。用热重(TG)法和差示扫描量热(DSC)法分析粉末试样的加热氧化情况。结果表明:氧化温度较高时,增重量大且氧化严重,随着氧化温度的升高,表面氧元素含量上升,氮元素含量下降;经过600℃氧化,TiN膜层开始出现局部氧化皮。热分析结果表明:TiN粉末在450℃开始发生增重,氧化总增重量为26.63%。起始氧化温度为623.7℃,放热焓为-2112μVs/mg。TiN coating was deposited on 201 type srainless steel by multi-arc ion plating in order to study the high temperature oxidation resistance of the TiN Coating between 400 and 800 ℃. The surface morphology and surface composi- tion of the oxidated coating were observed. The heating oxidation condition of the coated sample was analyzed by thermo- gravimetry （TG） and differential scanning calorimetry （I）SC）. The results show that the weight increment is higher and the oxidation is serious under the higher oxidation temperature. With the increase of oxidation temperature, the oxygen content increases and nitrogen content decreases on the surface. A partial oxide scale appeares on the TiN coating oxidated at 600 ℃. The thermal analysis indicates that the weight inerement of the TiN coating happens at 450 ℃, the total weight incre- ment is 26.63%. The initial oxidation temperature is 623.7 ℃ and the the thermal enthalpy is -2112 μVs/mg.

关 键 词：TIN涂层 氧化 热分析 

分 类 号：TG174.4[金属学及工艺—金属表面处理]