大型精密测量设备的微振研究  

Research on Micro-vibration of Large-scale Precise Measurement Equipment

作　　者：袁新江[1] 姜洋[1] 汪磊磊[1] 顾吉丰[1] 费庆国[2] 

机构地区：[1]南京电子技术研究所,江苏南京210039 [2]东南大学,江苏南京210096

出　　处：《电子机械工程》2012年第1期13-16,共4页Electro-Mechanical Engineering

摘　　要：微振对精密测量设备的测量精度有很大的影响。文中针对一种大型精密测量设备进行微振研究。依据惯性测量原理,对运行中的设备进行微振测试。根据微振测试结果得出设备的谐振点、启停的振荡时长、微振的位移振幅以及不同微振源对精度的影响程度等,并给出解决谐振问题的具体措施。微振研究结果对同类产品的设计具有指导意义。Micro-vibration has a great effect on the measurement precision of the precise measurement equipment.Aiming at the large-scale precise measurement equipment,micro-vibration is researched in this paper.By inertia measurement principle,micro-vibration test is done on the moving equipment.According to the result of the micro-vibration test,the resonant point,the oscillation time when the equipment starts and stops,the displacement amplitude of micro-vibration and the effect on measurement precision of different micro-vibration sources,etc.are obtained.Detailed measures to solve resonance are given in this paper.The study result of micro-vibration can instruct the design of the similar products.

关 键 词：微振 容许振动值 谐振点 振源 

分 类 号：TM937[电气工程—电力电子与电力传动]