石英微机械陀螺的研究进展  

Reaearch Development of Quartz Micromachined Gyroscopes

作　　者：关冉[1] 张卫平[1] 陈文元[1] 张弓[1] 成宇翔[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室,上海200240

出　　处：《微纳电子技术》2012年第3期173-180,共8页Micronanoelectronic Technology

基　　金：教育部新世纪优秀人才支持计划资助项目(NCET-10-0583);航天支撑基金资助项目(11GFZ-JJ02-005);微米/纳米加工技术重点实验室基金资助项目(9140C790405110C7904);上海交通大学研究生创新基金资助项目(Z-340-014)

摘　　要：首先介绍了石英微机械陀螺基于压电效应和科氏加速度的工作原理,回顾了石英微机械陀螺的发展历程,并且介绍了石英微机械陀螺的国内外发展现状。然后,针对石英微机械陀螺不同的结构进行了分类,并且对于不同结构的石英微机械陀螺的具体加工工艺、性能参数、应用领域等进行了综述。最后,对不同结构类型的石英微机械陀螺的尺寸、加工工艺,检测轴向,精度等参数进行了总结和对比,在此基础上分析了石英微机械陀螺的发展趋势,并指出了石英微机械陀螺研究中存在的问题,例如石英加工过程中产生的侧壁晶棱的不平整、石英侧壁电极的制作困难以及石英微机械陀螺多轴化应用的限制等。Firstly, the working principle of the quartz micromachined gyroscope is introduced, which is based on the piezoelectric effect and the Coriolis acceleration, the development history of the quartz micromachined gyroscope is reviewed, and the development present situation of the quartz micromachined gyroscope is introduced both domestically and abroad. Then, the quartz micromachined gyroscope is classified into several types according to its different structures, and the specific fabrication process, performance parameter and application fields of the quartz mi- cromaehined gyroscope for the different structures are reviewed. Finally, the parameters of the quartz mieromachined gyroscope for the different kinds of structures are summarized and com- pared, including the size, fabrication process, detection axis and accuracy, and on that basis, the development trends of the quartz mieromachined gyroscope are analyzed, and the problems that limit the development of quartz micromachined gyroscope are pointed out, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the difficulties of electrode fabrication on the quartz sidewall and the limitation of the multi-axis application for the quartz micromachined gyroscope.

关 键 词：石英 微机械陀螺 压电效应 科氏加速度效应 微电子机械系统(MEMS) 

分 类 号：TH703[机械工程—仪器科学与技术]