实用超高真空精确校准技术  

ACCURATE CALIBRATION TECHNIQUE OF ULTRAHIGH VACUUM

作　　者：李得天[1] 李正海[1] 冯焱[1] 

机构地区：[1]兰州物理研究所,兰州730000

出　　处：《真空与低温》2000年第1期26-29,共4页Vacuum and Cryogenics

摘　　要：介绍了一种超高真空精确校准技术。该技术依赖磁悬浮转子规 ,因此具有简单、实用、不确定度小等优点。给出了用该技术校准分离规的实验结果。An accurate calibration technique of ultrahigh vacuum was introduced,which based on spinning rotor gauge,so it has the advantages of simplicity,practicality and small uncertainty.In addition,the experimental results of calibrating extraction gauges with this techmique were presented.

关 键 词：磁悬浮转子规 超高真空测量 超高真空规 校准 

分 类 号：TB771[一般工业技术—真空技术]