电压调控多种金属膜波导特性研究  

Properties of various metal cladding waveguides modulated by voltage

作　　者：张一[1] 冯国英[1] 周国瑞[1] 隋展[2] 王建军[2] 马孜[3] 

机构地区：[1]四川大学电子信息学院,四川成都610064 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [3]西南技术物理研究所,四川成都610041

出　　处：《应用光学》2012年第2期427-432,共6页Journal of Applied Optics

基　　金：国家自然科学基金(60890200,10976017,10876022);固体激光技术国家级重点实验室基金

摘　　要：采用自由空间耦合的方法,激发双面金属包覆波导中的超高阶导模,通过在双面金属包覆介质波导的两个金属膜上加不同的电压,改变导波层铌酸锂的厚度和折射率,得到不同参数下的衰减全反射谱,从而验证超高阶导模的偏振不灵敏性及对导波层厚度和折射率十分灵敏的特殊性质,实验结果与理论相吻合。比较相同条件下反射率的变化,得到铝包覆波导的灵敏度要高于金包覆波导。所得结果对集成光电子器件的研制有一定的参考价值。In this article, the ultrahigh-order modes which exist in the symmetrical metal clad- ding optical waveguide are excited by using free-space coupling method. The refractive index and thickness of LiNb03 slab are changed through adding different voltages between the two metal films which are in symmetrical metal-cladding optical waveguide. The attenuated total reflection （ATR） spectrum with different parameters is obtained. The experimental results show that the ultrahigh-order mode is polarization independence and very sensitive to the thick- ness and refractive index of the waveguide layer. The experimental results agree better with theoretical predictions. Under the same conditions, the sensitivity of the symmetrical Al-clad- ding optical waveguide is higher than the symmetrical Au-cladding optical waveguide. The re- sults have certain reference value for the development of the integrated optoelectronic devices.

关 键 词：金属铝包覆波导 自由空间耦合 超高阶导模 衰减全反射谱 

分 类 号：TN252[电子电信—物理电子学] O441[理学—电磁学]