A new route for length measurement by phase-shifting interferometry  

作　　者：LUO ZhiYong LI ZhangHong 

机构地区：[1]National Institute of Metrology,Beijing 100013,China

出　　处：《Science China(Physics,Mechanics & Astronomy)》2012年第4期599-604,共6页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Key Technology R&D Program of China (Grant No. 2006BAF06B06)

摘　　要：By the mathematic models of flexible hinge,the accurate relationship between the phase-shifting and pressure acting on the hinge is deduced and verified by experimental results.Through the optimization of the geometric parameter of flexible hinge,a phase-shifting generator is developed to determine the length of an object precisely by interferometry.The experiments show that the triple phase-shifting produced using this generator is up to 1 m.With this generator,an example for the application in length measurement is introduced.The result shows the length uncertainty is 0.5 nm when the temperature uncertainty is limited in 2 mK.This paper provides a novel technique to measure the dimension of an object,especially to the diameter of a silicon sphere for Avogadro constant project.By the mathematic models of flexible hinge, the accurate relationship between the phase-shifting and pressure acting on the hinge is deduced and verified by experimental results. Through the optimization of the geometric parameter of flexible hinge, a phase-shifting generator is developed to determine the length of an object precisely by interferometry. The experiments show that the triple phase-shifting produced using this generator is up to 1 μm. With this generator, an example for the application in length measurement is introduced. The result shows the length uncertainty is 0.5 nm when the temperature uncertainty is limited in 2 mK. This paper provides a novel technique to measure the dimension of an object, especially to the diameter of a silicon sphere for Avogadro constant project.

关 键 词：phase-shifting interferometry flexible hinge mathematics model piezoelectricity transducer ETALON 

分 类 号：TG81[金属学及工艺—公差测量技术] TG84