润滑油膜双色光干涉测量系统的特性研究  

Dichromatic Interferogram of Lubricant Film Measurement

作　　者：周广梅[1] 郭峰[1] 李宏升[1,2] 

机构地区：[1]青岛理工大学机械工程学院,山东青岛266033 [2]清华大学电子工程系,北京100084

出　　处：《光学学报》2012年第3期105-110,共6页Acta Optica Sinica

基　　金：国家自然科学基金(50875136);国家973计划(2011CB706602)资助课题

摘　　要：基于多光束干涉理论和摄像系统的光谱响应特性,建立了润滑油膜彩色光干涉测量的色度学模型,以红绿双色光干涉测量为例设计了计算机程序复现了油膜厚度测量的干涉图像。双色光干涉的理论计算和实验测量取得了很好的一致性。进一步的计算表明,润滑油膜双色光干涉图像的色彩主要受光源双色光的半峰全宽、析光膜厚度、垫层厚度及润滑介质特性的影响。在所设定的计算参数条件下,双色光的半峰全宽较窄,析光膜厚度为4～10nm和垫层厚度较薄时图像的对比度较高。The multi-beam interference and the CCD camera spectral response, a colorimetric model is established for the interference measurement of lubricating-film thickness. A computation program is built for rendering the interferograms generated by a dichromatic light source in the lubricating-film measurement. For a static bail-glass disc contact, the results of theoretical simulation and experiment of the red-green dichromatic interferograms are agreed. Analyses show that the dichromatic interferogram is mainly influenced by the full width of half maximum （FWHM） of the green-red filter, the thickness of the beam splitter, the spacer thickness and the lubricants. A small FWHM, 4- 10 nm of the beam splitter thickness and low spacer thuickness can lead to high contrast of interference fringes.

关 键 词：测量 颜色复现 色度学模型 双色光干涉测量术 润滑油膜 

分 类 号：O439[机械工程—光学工程]