基于激光直写的微流光学触摸传感阵列  

Opto-Fluidic Tactile Sensor Array by Laser Direct Writing

作　　者：李贤[1] 袁余锋[1] 李书[1] 林巧[1] 范宇强[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室光及电磁波研究中心,浙江杭州310027

出　　处：《光学学报》2012年第3期111-116,共6页Acta Optica Sinica

摘　　要：设计并制作了一种基于激光直写技术的光学触摸传感器件。该器件采用光学微流结构实现对外加压力的连续比例测量。器件制作采用紫外激光直写技术配合高精度平移台实现,整体工艺过程在3min内完成。对所设计的传感器件的性能测试表明,光强信号随外力变化的曲线平滑,实测灵敏度为0.995mV/kPa。同时设计并制作了基于传感单元的阵列结构,不仅消除了光学累积误差,而且对集成化触摸传感的应用具有优势。A tactile sensor element is designed and fabricated based on laser direct writing technology. A continuous measurement of external tactile pressure is achieved by using an optical microfluidic structure. The tactile sensing element is fabricated using ultraviolet laser direct writing technology combining with a high-precision translation stage, and the overall process time is within 3 min. Experimental results show that the relation between external pressure and change in light intensity exhibits a smooth curve with a sensitivity of 0. 995 mV/kPa. The array structure is designed and fabricated based on this sensing element, and it is capable of not only eliminating optical accumulated error, but also enhancing integration of optical tactile sensing into various applications.

关 键 词：集成光学 光学设计 触摸传感 阵列 

分 类 号：TN256[电子电信—物理电子学]