CCD热工艺过程的硅片翘曲优化研究  

Unpowered Vessel Mooring Security Analysis in Disaster Weather

作　　者：祝贵兵[1] 池弘福[1] 吴剑锋[2] 

机构地区：[1]浙江海洋学院海运学院,浙江舟山316004 [2]浙江国际海运职业技术学院,浙江舟山316000

出　　处：《浙江海洋学院学报（自然科学版）》2012年第1期70-74,共5页Journal of Zhejiang Ocean University(Natural Science Edition)

基　　金：浙江省教育厅项目（Y201018962）;舟山市科技局项目（092020）

摘　　要：针对光刻线宽均匀性控制问题,研究了硅片翘曲度对光刻线宽均匀性的影响。采用翘曲度测试仪研究热工艺过程中硅片翘曲度的变化。研究结果表明,硅片翘曲度对线宽均匀性产生重要的影响,翘曲度大,则线宽均匀性降低。通过优化栅氧化工艺的升降温速率、进出炉速率,使硅片翘曲度降低,线宽非均匀性由±4%降低到±2%。Unpowered vessel mooring, when resisting current and wave）, will generate loads that lead to strong interference forces in disaster weather （wind, dragging anchor. In order to study the loads, separated modeling method is applied. Through the force analysis under every working condition, matlab is used to conduct simulation calculation. The result is： when the wind force is over 8 m/s, A/L over 0.7 or combined action （wind, current and wave） over 3.7×10^4 kg, the shilJ should be evacuated. This result can be taken as a reference by disaster-relief staff, administrators concerned and crew.

关 键 词：CCD 热工艺 翘曲度 光刻条宽 

分 类 号：U675.92[交通运输工程—船舶及航道工程]