磁控溅射ZrN薄膜厚度对其色度的影响  

Effect of Film Thickness on the Color of Magnetron Sputtering ZrN Films

作　　者：孙维连[1,2] 安广[1] 孙铂[1] 王会强[1,2] 李新领[1,2] 

机构地区：[1]河北农业大学机电工程学院,保定071001 [2]河北省轻金属合金材料工程技术研究中心,保定071001

出　　处：《表面技术》2012年第2期47-49,78,共4页Surface Technology

基　　金：河北省自然科学基金(E2009000646)

摘　　要：采用中频非平衡磁控溅射技术在镜面不锈钢板上制备了ZrN薄膜,通过改变镀膜时间控制ZrN薄膜的厚度。用色差仪测定了不同厚度ZrN薄膜的L*,a*和b*值,绘制出不同厚度ZrN薄膜的L*,a*和b*值的变化曲线图,得出膜层厚度对薄膜色度的影响规律:膜层厚度低于63.7nm时,随着膜层厚度的增加,L*和a*值无变化,b*值呈线性递增,且颜色逐渐趋于金黄色;膜层厚度高于63.7nm时,随着膜层厚度的增加,薄膜颜色坐标未有明显变化,颜色为稳定的金黄色。The ZrN film was prepared on the mirror stainless steel plate by using unbalanced magnetron sputtering technique.The thickness of ZrN films was controlled by changing the coating time.The L＊,a＊,b＊ values of the ZrN thin films with different thickness was measurea with X-rate colorimeter.The curve about the L＊,a＊,b＊ values of the ZrN thin films with different thickness was draw out.The color variation of the magnetron sputtering ZrN films effected by the film thickness is obtained： when film thickness is less than about 63.7 nm,with the film thickness increasing,the L＊,a＊ values do not change,b＊ values are increase by linear,and the color of the film become gold gradually;when film thickness is over about 63.7 nm,with the film thickness increasing,the chromaticity coordinates of the film has no significant change,and the color is stable gold.

关 键 词：沉积速率 膜层厚度 ZrN薄膜 色度 

分 类 号：TG174.444[金属学及工艺—金属表面处理]