低气压、弱电离条件下氢气直流放电反应的模拟分析  

Simulation of hydrogen dc discharge reactions with low pressure and weakly ionization

作　　者：高媛[1] 刘竞业[1] 王刚[1] 

机构地区：[1]北京化工大学理学院物理学与电子科学系,北京市100029

出　　处：《真空》2012年第2期96-100,共5页Vacuum

基　　金：国家自然科学基金项目;项目批准号:50877003

摘　　要：以等离子体放电理论为基础,依据电子密度连续性方程,电子通量方程,电子能密度连续性方程,以及电子能通量表达式,分别运用有限元法和有限时域差分法,针对氢气直流放电过程的21种碰撞反应类型进行模拟分析。确定了氢气放电所涉及的21种反应类型,在低气压、弱电离条件下仅有11种反应对过程的进行起到有效作用。所得模拟结果与实验测试结果一致。Based on the plasma discharge theory, according to electron density continuity equation, electron flux equation, electron energy density continuity equation and electron energy flux expressions, 21 kinds of related reaction types in hydrogen plasma dc discharge process were analyzed by the finite element and finite-difference time-domain （FDTD） numerical simulation. Finally, 11 types of main reactions were confirmed, which play a major role in the low pressure and weakly ionization. The simulation results are consistent with the experimental ones.

关 键 词：氢气 直流放电 弱电离 等离子体 反应 

分 类 号：TN132[电子电信—物理电子学] TB717[一般工业技术—真空技术]