表面粗糙度光切显微镜测量系统的研制  

Development of measurement system about light-section microscope for surface roughness

作　　者：刘颖[1] 郎治国[2] 唐文彦[3] 

机构地区：[1]北京航天时代激光导航技术有限责任公司 [2]中国人民解放军61081部队 [3]哈尔滨工业大学自动化测试与控制系

出　　处：《红外与激光工程》2012年第3期775-779,共5页Infrared and Laser Engineering

摘　　要：以光切法测量原理为基础,采用CCD摄像头和传统光切显微镜,使用VC开发工具和图像处理技术开发了一套材料表面粗糙度测量系统。根据光切显微镜下材料表面粗糙度图像有明显方向性的特征,使用旋滤波方法对图像进行预处理,并与传统的几种滤波方法进行了比较,同时讨论了滤波窗口的大小和切线方向采用的滤波方法对粗糙度测量结果的影响。该测量系统能够测量新国标中的全部参数,并能进行在线测量。介绍了系统的标定方法,对影响测量精度的主要误差因素进行了分析,并对算术平均偏差Ra为3.2μm的标准粗糙度比较样块进行了测量,测得的结果是:Ra约等于2.93μm,相对误差约为-8.5%,低于该系统的示值允许误差。A material surface roughness measurement system based on light-section principle and consisted of CCD camera and conventional light-section microscope as well as by using of VC development tool and image process technique was developed.Due to the characteristic that the image of the material surface roughness under light-section microscope had obvious directivity,the images were preprocessed by using of the spin filtering method and the roughness measurement results were compared with the ones based on the conventional filtering methods.The influences of the size of filter window and the filtering method on the tangent direction on measurement results were discussed at the same time.All parameters of the new national standard can be measured by using of this measurement system,and the on-line measurement can be realized.The calibration method of the system was introduced and the main error factors of influencing measurement precision were analyzed.The arithmetical mean deviation Ra which value was 3.2 μm was measured,and the result is 2.93 μm and the relative error is-8.5% which is less than the indicating value allowable error of the system.

关 键 词：表面粗糙度 光切法 测量 图像处理 

分 类 号：TN247[电子电信—物理电子学]