铌酸锂光波导制作工艺进展  

Advances in manufacturing processes for lithium niobate waveguides

作　　者：赵明璐 王定理[1,2] 马卫东[1,2] 

机构地区：[1]光纤通信技术和网络国家重点实验室,湖北武汉430074 [2]武汉光迅科技股份有限公司,湖北武汉430074

出　　处：《光通信研究》2012年第2期35-38,共4页Study on Optical Communications

基　　金：国家科技支撑计划资助项目(2009BAH49B03)

摘　　要：文章综述了几种常用的铌酸锂波导的制作工艺,包括表面外扩散、金属内扩散、离子交换和质子交换,并分析、比较和总结了在不同工艺制作的条件下对铌酸锂光波导的性能造成的不同影响。目前,获得高质量光波导的主要途径是Ti扩散和质子交换。同时,文章对逐渐建立起的铌酸锂波导光学特性和结构特性之间的理论关系也进行了介绍。This paper presents an overview of the theories and several commonly used manufacturing processes for lithium niobate waveguides,including out-diffusion of lithium oxide from the crystal surface,in-diffusion of metals,iron exchange and proton exchange,and analyzes,compares and summarizes the effects of different processes on the performances of the waveguides.At the present,Ti diffusion and proton exchange are the main channels for achieving high quality lithium niobate waveguides.In addition,it introduces the theoretical correlation between the optical properties and structural characteristics of lithium niobate waveguides gradually built up in recent studies.

关 键 词：铌酸锂 光波导 工艺 

分 类 号：TN252[电子电信—物理电子学]