分体式激光扩束系统平行度测量装置的设计  

Design of parallelism measuring equipment for laser beams from independent laser expanding beam system

作　　者：张磊[1,2] 郭劲[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2012年第4期789-795,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2006AA04Z367);中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(No.061X20C060)

摘　　要：为精确测量强激光发射系统中高功率激光经分体式扩束系统后光束的传输方向,设计了一种新型分体式扩束系统输出光平行度测量装置。根据高功率激光分体式扩束系统及红外激光的特点,该装置采用高分辨率红外CCD作为监测成像设备。采用轻质高刚度的优质铝合金对装置的机械结构进行了设计,切换部件搭载在高精度线性位移平台上。基于高分辨率CCD和精密线性位移平台,该装置可较好地完成动态和静态测量。测试结果表明,该平行度测量装置工作稳定、可靠,测量精度优于2.0″;装置设计合理,实用,可为扩束系统的装调及应用提供可靠依据。To accurately measure the transmission directions of high power laser beams from a laser independent expanding beam system in the laser launching system,the equipment for measuring the parallelism error of independent expanding beam system is designed.Firstly,based on the speciality of the independent expanding beam system and the IR laser,the equipment uses a high resolution IR CCD for measuring and imaging.Then,the mechanical structure of the equipment is constructed by using aluminum alloys with light quality and high rigidity,and its activity parts are building on a linear moving platform with high precision.On the basis of the high resolution CCD and the precise displacement platform,the equipment can implement the dynamic and static measurement.The experimental results show that the equipment works stably and reliably and measuring precision is better than 2″.It satisfies the requirements of the laser launching system,and can provide basis for the assembly and application of the expanding beam systems.

关 键 词：高功率激光系统 分体式扩束系统 平行度测量装置 装调 

分 类 号：TH741.14[机械工程—光学工程]