时栅位移传感器的误差修正实用技术  

Practical Technology of Error Correction for Time Grating Displacement Sensor

作　　者：彭东林[1] 周玮[1] 陈锡侯[1] 高忠华[1] 郑方燕[1] 

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《机械传动》2012年第4期34-36,共3页Journal of Mechanical Transmission

基　　金：国家自然科学基金资助项目(50975304)

摘　　要：针对时栅角位移传感器定子和转子的加工误差对测量精度的影响,利用多测头法分离出多次谐波成分并加以修正。根据场式时栅角位移传感器的误差特点,针对32对极场式时栅进行了理论分析,分离并消除64次及64的整数倍次以外的谐波分量。定子和转子线槽的分度误差被修正以后,时栅角位移传感器测量精度达到了2′的预定指标。For time grating angular displacement sensor processing error affecting the measurement accuracy problems,Multi-position probe method is used to isolate multiple harmonic error and aimed to error correction.According to the field type time grating angular displacement sensor error characteristics,the 32 antipodal sensors are analyzed theoretically,64 multiple harmonics are isolated,and the influence of periodicity multiple harmonic error has been removed by multi-position probe method.The error correction method eliminated systematic error of manufacturing processes.The time grating angular displacement sensor precision reach expected targets of 2′.

关 键 词：时栅 多测头法 误差修正 谐波误差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]