平面光波导精密对准平台运动误差的敏感性分析  

Motion Error Sensitivity Analysis of Planar Optical Waveguide Precise Aligning Stage

作　　者：唐皓[1] 段吉安[1] 郑煜[1] 祝孟鹏[1] 

机构地区：[1]中南大学高性能复杂制造国家重点实验室,长沙410083

出　　处：《中国机械工程》2012年第8期888-892,896,共6页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(50735007;50975293;51075402);国家高技术研究发展计划(863计划)资助项目(2007AA04Z344)

摘　　要：在阵列光纤与波导芯片的对准过程中,多自由度精密运动平台的运动精度直接影响其耦合效率。针对此问题,运用多体动力学理论,通过分析运动平台的各项误差源,建立了多自由度精密运动平台的误差模型。采用基于方差的Sobol法对运动平台的各项误差进行敏感性分析,从而得到了各误差参数在敏感方向的影响程度。试验结果与理论分析结果基本吻合,说明该模型具有一定的适用性。该模型可为多自由度精密运动平台的运动精度控制、误差补偿分析以及系统优化设计提供借鉴。In aligning process of a fiber array and waveguide chip,the motion accuracy of multi-DOF precise motion stage impacts the coupling efficiency directly.Adopting multi-body dynamics theory,each error source of the motion stage was analyzed,the error model of multi DOF precise motion stage was built,and the Sobol method which was based on variance was used to develop sensitivity analysis,and the impaction degree of each error parameters at each direction was derived.The experimental results reflect that the modeling method and sensitivity analysis method are available,which means the method is applicability.The sensitivity analysis can provide data for motion precision control,error compensation analysis and system optimization.

关 键 词：光波导对准 精密运动平台 多体动力学 敏感性分析 

分 类 号：TN252[电子电信—物理电子学]