氩气压强对涤纶织物表面溅射银膜特性的影响  

Effect of argon gas pressure on properties of nano-structured silver films sputtered on surface of polyester fabric

作　　者：孟灵灵[1,2] 魏取福[1] 黄新民[2] 

机构地区：[1]生态纺织教育部重点实验室(江南大学),江苏无锡214122 [2]盐城工学院纺织服装学院,江苏盐城224051

出　　处：《纺织学报》2012年第4期29-33,共5页Journal of Textile Research

基　　金：高等学校博士学科点专项科研基金项目(20090093110004)

摘　　要：以涤纶纺粘非织造布和平纹布为基底,高纯银为靶材,采用射频磁控溅射法制备纳米银薄膜,研究真空室氩气压强对纳米银膜表面形貌、样品透光性能和导电性能影响。结果表明:以涤纶纺粘非织造布为基底,氩气压强为0.3 Pa时,银膜表面粗糙度和颗粒尺寸最大,团聚生长最明显,压强为0.6 Pa时,银膜导电性能最佳;以涤纶平纹布为基底,氩气压强为0.6 Pa时,银膜表面粗糙度和颗粒尺寸最大,团聚生长最明显,压强为0.3 Pa时,银膜导电性能最佳;沉积纳米银膜的样品对紫外光有较强的吸收能力,氩气压强的变化对样品屏蔽紫外线效果不明显。The nano-structured silver films are prepared by RF magnetron sputtering on the polyethyleneterephthalate（PET） nonwoven fabric and polyester plain fabric.The effect of Ar gas pressure in vacuum on the morphology of the nano-structured silver films,light transmission and the conductivity of samples deposited with silver films is investigated.Results of experiments show that in the case of using PET nonwoven fabric as the substrate,the surface roughness of silver film is biggest,particle size is largest and particle formed on the surface of film is most distinct when the pressure is 0.3 Pa,but when pressure is 0.6 Pa,the conductivity of silver film is optimum.When polyester plain fabric is used as the substrate and the pressure is 0.6 Pa,the surface roughness of silver film is biggest,particle size is largest and particle formed on the surface of film is most distinct,but the conductivity of silver film is best when pressure is 0.3 Pa.The samples deposited with silver films show better UV absorption,and the change of Ar gas pressure has no obvious influence on the UV shielding of the samples.

关 键 词：射频磁控溅射 纳米银膜 涤纶织物 原子力显微镜 透光性能 导电性能 

分 类 号：TS174[轻工技术与工程—纺织材料与纺织品设计]