Design and implementation of digital closed-loop drive control system of a MEMS gyroscope  

MEMS陀螺数字闭环驱动控制设计与实现(英文)

作　　者：王晓雷[1,2] 李宏生[1,2] 杨波[1,2] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096

出　　处：《Journal of Southeast University(English Edition)》2012年第1期35-40,共6页东南大学学报（英文版）

基　　金：The National Natural Science Foundation of China(No. 60974116 );the Research Fund of Aeronautics Science (No.20090869007);Specialized Research Fund for the Doctoral Program of Higher Education (No. 200902861063)

摘　　要：In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop （PLL） in frequency control and an automatic gain control （AGC） method in amplitude control. A digital processing circuit with a field programmable gate array （FPGA） is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.为了有效控制陀螺驱动模态的工作状态,从原理上分析了微机械陀螺的驱动特性,提出了一个新型的微机械陀螺闭环驱动数字控制电路,即采用数字锁相环和自动增益控制方法分别控制驱动频率和振荡幅度.设计了带有现场可编程门阵列的数字处理电路,并进行了实验.结果表明:当温度变化时,驱动频率能够自动跟踪陀螺驱动模态的谐振频率,并且振荡幅值始终保持在设定值.在常温下驱动频率相对偏差为0.624×10-6,振荡幅值相对偏差为8.0×10-6,分别是模拟控制方案的0.094%和18.39%.因此,基于数字锁相环和自动增益控制的频率和幅值闭环驱动控制方案是可行的.

关 键 词：micro electromechanical system （MEMS） digitalgyroscope drive frequency phase-locked loop （PLL） oscillating amplitude automatic gain control （AGC） 

分 类 号：U666.123[交通运输工程—船舶及航道工程]