基于Modbus协议的立式炉电力监测系统  

Power Monitor System for Vertical Furnace Based on Modbus Protocol

作　　者：王艾[1] 徐冬[1] 

机构地区：[1]北京七星华创电子股份有限公司集成电路工艺设备研发中心,北京101312

出　　处：《电子工业专用设备》2012年第4期16-19,共4页Equipment for Electronic Products Manufacturing

摘　　要：针对300 mm立式炉设备电力安全性、可靠性的需要,设计、实现了一套立式炉电力监测系统。基于Modbus协议,该系统实现上位机实时获取并保存立式炉设备上各段温区的电力数据。保存的电力数据不仅可用于设备的故障诊断,还可用于分析炉体加热器在各温度点上的电学特性。该系统已应用于实际的立式炉设备电力监测。实际效果表明,该系统具有运行可靠、扩展性好、使用方便的特点。A power monitor system for vertical furnace was designed and realized for the sake of power safety and reliability. Through the system, the upper computer could acquire and save real-time power data of every temperature zone. The acquired power data were not only applied to fault diagnosis, but also analyzed electrical features of heaters at each temperature points. Finally, the actual results indicated that the power monitor system could successfully satisfy the requirements of vertical furnace in reliability, expansibility and convenience.

关 键 词：立式炉 MODBUS协议 串口通信 故障诊断 

分 类 号：TN305[电子电信—物理电子学]