直拉式单晶炉整体结构静力分析  

Static Analysis of the Machine Structural of Czochralski Single-crystal furnace

作　　者：杨润[1] 彭曦[1] 胡超[1] 李淑娟[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048

出　　处：《电子工业专用设备》2012年第4期24-28,56,共6页Equipment for Electronic Products Manufacturing

摘　　要：TDR-120型直拉式单晶炉的底部多块垫铁的受力为超静定问题,从材料力学的角度,无法准确获得每块垫铁上的受力。采用ANSYS软件进行静力分析,建立机架部分有限元模型,以该单晶炉在不同工作情况下的受力为研究对象,对比分析了两种不同的方案下3种典型工况机架的变形情况和应力分布,利用软件后处理从微观应力云图提取来确定宏观力,进而获得炉体底座下各垫铁承受的力。通过计算出的各垫铁的支承力对比分析了两种方案下机架结构的稳定性要求,验证单晶炉机架结构静态性能,为单晶炉结构方案的改进提供依据。The forces acted on the supportive parts which are under the TDR-120 Czochralski single-crystal furnace are hyperstatic from the view of mechanicals of material cannot be obtained precision on each supportive part.This paper establishes FEA model of rack using ANSYS and studies the force acted on the supportive parts and the deformation and stress distribution of rack in the different work situations in two schemes which the one is that the seven supportive parts without linkage the earth and another is that five supportive parts linkage the earth.Using the post-process of ANSYS,the concentrated force from the stress cloud diagram and then the force acted on each supportive part under the furnace body are be achieved.Based on the force on each supportive part,the stability of machine is conducted and the static performance is validated in two schemes respectively which provides the basis for updating the structure of the TDR-120 Czochralski single-crystal furnace.

关 键 词：直拉式单晶炉 机架 静力分析 ANSYS后处理 

分 类 号：TN305[电子电信—物理电子学]