光栅测量系统的误差研究  

Research on dynamic error of grating measurement system

作　　者：陈晓怀[1] 杜国山[1] 程真英[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《电子测量与仪器学报》2012年第3期187-191,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金(编号:50675057)资助项目

摘　　要：研究光栅系统的误差构成及其变化规律,对提高光栅测量系统的精度,进行测量系统结构的优化设计均具有重要意义。在全面分析光栅测量系统误差来源的基础上,定量描述了光栅副误差、导轨误差、工作台误差,建立了光栅测量系统总误差模型;研制了一套激光干涉仪与光栅测量系统实时比对实验装置,实现了光栅测量系统综合误差的分离。通过模型仿真与实验比对,验证了总误差模型的有效性。应用该模型对光栅测量系统进行误差修正,能显著提高光栅系统的精度,使测量不确定度减小了一半。The errors constitute and the changing rule of the grating system is researched.It is important for improving the accuracy of measurement and optimizing the structure design.On the basis of the comprehensive analysis of the error source of the system,the grating-pair error,guide error and table error were described quantitatively,and the total error model was established.An experimental device was developed,which can achieve real-time comparison for the laser interferometer and the grating measurement system,and the separation for the error of grating measurement system was realized.The effectiveness of the total error model was verified by the simulation and experimentation.The application of the model in the grating measurement system for error correction can significantly improve the accuracy of the grating system,and the measurement uncertainty is reduced by half.

关 键 词：光栅测量系统 误差建模 误差分离 误差修正 

分 类 号：TH701[机械工程—仪器科学与技术]