谐振腔衰荡法检测激光高反射薄膜损耗  

Using cavity ring-down to test laser high reflective thin film′s loss

作　　者：岳威[1] 韩永昶[1] 东野斯阳[1] 武淑明[1] 赵明艳[1] 

机构地区：[1]固体激光技术国家级重点实验室,北京100015

出　　处：《激光与红外》2012年第4期413-416,共4页Laser & Infrared

摘　　要：光学薄膜的损耗类型主要涉及吸收和散射,精确测定其数值是制备具有高品质和灵敏度指标激光薄膜的前提。本文以薄膜光学和激光技术为背景,介绍了谐振腔衰荡检测高反射薄膜的原理、特性以及测试方法。以1064 nm和1311 nm的高反射膜层为例,利用Losspro激光测试装置,对于二氧化锆(ZrO2)、五氧化二钽(Ta2O5)材料获得百万分(ppm)量级精度的损耗数据后,针对不同薄膜材料和工艺方法进行了对比检测,分析认为速率控制和离子束能量对于相同材料的激光高反射薄膜具有明显的影响,进而为薄膜样品的制备奠定了技术基础。Loss of optical thin film mainly involves absorption and scattering.Accurate determination of its value is the precondition of coating high quality laser film.This paper introduces the principle,characteristics and test method of cavity ring-down detection for high reflectance coatings.Taking 1064 nm and 1311 nm high reflection films as examples,after accessing parts per million（ppm）weight loss of ZrO2 and Ta2O5,we use Losspro laser test equipment to compare different thin film materials and coating methods.We conclude that the rate control and ion beam energy for the same high reflective thin film materials have obvious effects.The research of cavity ring-down detection offers basis for the manufacture of thin films.

关 键 词：谐振腔衰荡 光学薄膜 薄膜损耗 高反射 

分 类 号：O484[理学—固体物理]