(Ti,Al)N涂层应力沿层深分布的调整及大厚度涂层的制备  

MODIFICATION OF STRESS DISTRIBUTION ALONG THE THICKNESS OF(Ti,Al)N COATINGS AND PREPARATION OF THE COATINGS WITH LARGE THICKNESS

作　　者：赵升升[1] 程毓[1] 常正凯[2] 王铁钢[2] 孙超[2] 

机构地区：[1]深圳职业技术学院,深圳518055 [2]中国科学院金属研究所,沈阳110016

出　　处：《金属学报》2012年第3期277-282,共6页Acta Metallurgica Sinica

基　　金：国家自然科学基金项目50471072;广东省自然科学基金项目S2011040004468资助~~

摘　　要：利用电弧离子镀技术在不锈钢基体上制备了(Ti,Al)N涂层,研究了N_2分压改变对涂层残余应力沿层深分布及相关力学性能的影响.结果表明,低N_2分压下,(Ti,Al)N涂层残余应力沿层深分布较均匀,随N_2分压的增加,涂层应力沿层深呈"钟罩型"分布,且全膜厚的应力值也明显增大;通过对涂层生长结构及微观成分分析,初步探讨了应力分布机理.随N_2分压的增加,涂层硬度会显著增加,而膜/基结合力则大幅下降;采用改变N_2分压工艺制备(Ti,Al)N涂层,可有效调整涂层残余应力沿层深分布趋势,改善其力学性能,并可成功制备厚度在130μm以上的硬质涂层.The effects of N_2 partial pressure on the depth distribution of residual stresses and mechanical properties in the（Ti,Al）N coatings prepared by arc ion plating（AIP）,were investigated. The results indicate that the stress distribution was roughly uniform when the coatings were deposited under lower N_2 partial pressure.As the partial pressure increased the stress distribution to exhibited a ＂bell＂ shape and the average stresses of coatings increased remarkably.The mechanism of stress distribution was analyzed by characterizing the microstructure and the composition of the coating.The N_2 partial pressure also affected the hardness of coatings and the coating/substrate adhesion obviously. The higher the N_2 partial pressure is,the higher the coating hardness but the lower the adhesion.The stress distribution can be modified and the adhesion of the coating/substrate can be improved by optimizing N_2 partial pressure parameter.Finally,the coatings with the thickness over 130μm were successfully directly deposited on the substrate through optimizing the N_2 partial pressure.

关 键 词：(Ti A1)N 硬质涂层 应力分布 调整应力 N_2分压 

分 类 号：TG174.4[金属学及工艺—金属表面处理]