定向金刚石膜的合成及机理探索  

Synthesis of Oriented Diamond Films and Its Mechanism

作　　者：唐璧玉[1] 杨国伟[1] 任志昂[1] 蔡孟秋[1] 

机构地区：[1]湘潭大学物理系,湘潭411105

出　　处：《半导体光电》2000年第2期150-152,共3页Semiconductor Optoelectronics

基　　金：湖南省计委和科委资助项目

摘　　要：采用热丝化学汽相淀积 (CVD) ,未用别的辅助措施 ,合成了 (10 0 )晶面的金刚石膜。结合CVD金刚石成核的微观过程 ,探讨了定向金刚石膜的形成机理。发现和研究了表面扩散对CVD金刚石成核的重要影响。Oriented (100) diamond film is deposited on silicon substrate by adjusting process parameters without use of other assisted measures in hot-filament CVD system.Mechanism of its synthesis is discussed based on microprocess of the nucleation of CVD diamond.A great impact of surface diffusion on CVD diamond nucleation is discovered and investigated .

关 键 词：化学汽相沉积 定向金刚石膜 无定形碳 表面扩散 

分 类 号：TN304.18[电子电信—物理电子学]