Piranha改性玻璃基板液相沉积制备SrTiO_3功能陶瓷薄膜(英文)  

Preparation of SrTiO_3 Functional Ceramic Thin Film on Glass Wafers Treated byPiranha Solution with Liquid Phase Deposition Method

作　　者：刘剑[1] 董秀珍[1] 郝斌[1] 李悦[1] 

机构地区：[1]唐山学院环境与化学工程系,唐山063000

出　　处：《无机化学学报》2012年第5期1065-1069,共5页Chinese Journal of Inorganic Chemistry

基　　金：唐山市科学技术研究与发展指导计划项目(No.11110214a);唐山学院科研课题(No.11001B)资助项目

摘　　要：以Piranha溶液处理玻璃基板,采用液相沉积技术,制备了钛酸锶晶态薄膜。改性基板的亲水性测定与偏光显微镜测试表明,Piranha溶液能够有效改善玻璃基板的亲水性,并且基板表面的硅烷醇对钛酸锶薄膜的沉积具有积极指导作用;X射线衍射(XRD)与扫描电镜(SEM)表征显示,制备成功的钛酸锶薄膜纯度高,结晶良好,样品表面均匀,在垂直基板表面方向上呈纤维花簇状生长。文章同时对基板表面硅烷醇形成过程进行了研究。SrTiO3 thin film was prepared on glass wafers treated by piranha solution （a mixture of sulfuric acid and hydrogen peroxide） with Liquid Phase Deposition method. Contact angle measurement of glass wafers and photographs of polarizing microscope indicate that hydrophilic characteristic of the substrate is improved by piranha solution, and an induction of deposition SrTiO3 thin film by Si-OH groups. XRD and SEM results show that the pure and homogeneous SrTiOz thin film is a well-crystalline one. The prepared SrTiO3 thin film is grown vertically on the glass substrate. The formation mechanism of Si-OH groups is also discussed.

关 键 词：Piranha 液相沉积 钛酸锶 

分 类 号：O614.231[理学—无机化学] O614.411[理学—化学]