双H型石英陀螺电容耦合分析与电极优化设计  

Capacitance coupling analysis and electrode optimum design for double H type quartz gyroscope

作　　者：冯立辉[1] 张志雄[1] 崔芳[1] 王健[1] 孙雨南[1] 

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《中国惯性技术学报》2012年第2期230-233,共4页Journal of Chinese Inertial Technology

基　　金：国家部委预研项目(200653009)

摘　　要：双H型石英陀螺的音叉结构具有电极工艺简单的优点,但该陀螺的电容耦合噪声比H型石英陀螺的电容耦合噪声大。为减小电容耦合噪声,分析了双H型音叉的电容耦合噪声的影响和产生机理,采用ANSYS软件分析电容耦合噪声。在驱动电极上加载电压载荷,采用静态分析功能,在后处理器POST1中获取敏感电极的电荷量,利用电压和电荷的关系获取检测电极的耦合分布电容,采用这一指导原则,设计了一种新电极分布的音叉;通过仿真和测试对比了新电极和旧电极音叉的耦合分布电容,测试结果表明,新的电极设计的耦合电容值为旧电极的耦合电容值的50%左右。介绍了一种新的电极结构的双H型石英陀螺,并给出耦合电容的仿真分析及测试方法,该方法可以指导石英陀螺电极设计。The double-H type quartz tuning fork gyroscope has such advantage as the electrode can be fabricated easily. But the capacitance coupling noise of the double-H type gyroscope is larger than that of H type gyroscope. To reduce the capacitance coupling noise, the influence and mechanism of capacitance coupling in double-H gyroscope were analyzed and simulated by ANSYS sottware. By ANSYS software, the voltage load was applied, the static analysis was carried out, and the charge of pickup electrode could be got in the POST1 postprocessor. The coupling capacitance could be calculated by the relationship between the voltage and charge. According to this method, a tuning fork with a new electrode distribution was designed, and the capacitance coupling in the double-H tuning fork both with the new electrode and with the old electrode were simulated and tested. The results show that the capacitance coupling noise for the new design had been decreased to about 50% compared with that of the old electrode. A double-H type tuning fork with the new electrode distribution was given, and the method was introduced to simulate and test the capacitance coupling. This method can be a reference for the design of quartz gyroscope electrode.

关 键 词：石英陀螺 电容耦合噪声 ANSYS仿真 耦合电容测试 

分 类 号：U666.1[交通运输工程—船舶及航道工程]