高均匀扫描电机轴面不平行度动态测量方法研究  

Dynamic Measurement Methods of Unparallelism of High Uniform Scanning Motor Shaft and Mirror

作　　者：张金云[1] 姚恩涛[1] 贾俊涛[2] 

机构地区：[1]南京航空航天大学自动化学院,江苏南京210016 [2]洛阳电光设备研究所,河南洛阳471000

出　　处：《计测技术》2012年第2期11-14,25,共5页Metrology & Measurement Technology

基　　金：航空科学基金资助项目(2010ZC09003);江苏高校优势学科建设工程资助项目

摘　　要：为了解决高均匀扫描电机转动轴位置未知时与反射镜面不平行度的测量问题,提出了一种动态的光电测量方法;在激光测量光路中,利用扫描电机在位置敏感传感器(PSD)上的扫描曲线,并根据光学成像原理和扫描曲线的外形特征,设计了一个光学实验系统;利用实验方法建立了轴面俯仰角度与扫描曲线形状的关系式,最后对扫描电机轴面不平行度的特性进行了测试分析。实验表明,此种测量方法能够很好地解决动态测量扫描电机轴面不平行度的问题。In order to address the problem of measuring the unparallelism of high uniform scanning motor shaft whose position is unknown and the surface of mirrors, a dynamic optical measurement method is proposed in the light path of the laser measurement, making use of the curve which is drawn by the scanning motor on the position sensitive detector （PSD） , and according to the principle of optical imaging and the characteristics of the scanning curve＇s shape, an optical test system is designed. The relationship between the axial tilt angle and scanning curve shape is established using experimental methods. Finally, the characteristics of the unparallelism of the scanning motor shaft and the surface of mirror are tested and analyzed. Experiments show that such measurements can solve the problem of dynamic measurement that the scanning motor shaft is not parallel to the surface of mirror.

关 键 词：高均匀扫描电机 不平行度 动态测量 位置敏感传感器 

分 类 号：TN206[电子电信—物理电子学]