Te溶剂-Bridgman法Cd_(0.9)Mn_(0.1)Te晶体生长习性研究  

Study on Cd_(0.9)Mn_(0.1)Te Growth Behavior by Te Solvent-Bridgman Method

作　　者：郑昕[1,2] 杜园园[1,2] 王涛[1,2] 介万奇[1,2] 齐阳[1,2] 栾丽君[3] 

机构地区：[1]西北工业大学凝固技术国家重点实验室,西安710072 [2]西北工业大学材料学院,西安710072 [3]长安大学材料科学与工程学院,西安710061

出　　处：《人工晶体学报》2012年第2期306-311,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金(50872111;50902113;50902114)资助项目;国家重点基础研究发展计划(973)(2011CB610406)资助项目;中国111项目(B08040);西北工业大学基础研究基金;西北工业大学凝固技术国家重点实验室研究基金

摘　　要：采用Te溶剂-Bridgman法生长了尺寸为Ф30 mm×60 mm的Cd0.9Mn0.1Te∶In晶锭,通过淬火得到了生长界面形貌。测试了晶片在近红外波段的透过率和电阻;采用化学腐蚀的方法观察了晶片中位错,Te夹杂和孪晶界;采用光学显微镜和红外成像显微镜观察了生长界面处附近的形貌。测试结果表明,晶锭中部结晶质量较好的晶片红外透过率达到60%,电阻率达到2.828×1011Ω.cm。位错密度在106cm-2数量级,Te夹杂密度为1.9×104cm-2,同时孪晶密度明显低于Bridgman法生长的晶锭。生长界面宏观形貌平整,呈现微凹界面。但由于淬火过程的快速生长,界面微观形貌发生变化,呈现不规则界面,并在界面附近形成富Te相的包裹。Cd0.9Mn0.1Te∶In crystal ingot with size of Ф30 mm×60 mm was grown through Te solvent-Bridgman method.IR transmittance and resistivity were measured to evaluate its crystalline quality.Chemical etching was applied to reveal the crystal defects,including dislocations,twins and Te inclusions.The macro-and micro-morphology of growth interface were quenched and observed with optical microscopy and infrared transmission microscopy.Te solvent-Bridgman method could effectively decline growth temperature and reduce the dislocation density in the ingot.The IR transmittance of wafers in the middle of the ingot reaches 60% and the bulk resistivity reaches 2.828×1011 Ω·cm.The EPD of a good quality wafer is about 106 cm-2,Te inclusions density measured through IR transmission microscopy is about 1.9×104 cm-2comparing with conventional Bridgman growth method.The quenched growth interface shows a slightly concaved appearance in macro-scale.However,the micro-scale interface is not smooth due to fast growth in quenching process.Meanwhile high density of Te inclusion near the interface was observed.

关 键 词：Cd0.9Mn0.1Te晶体 Te溶剂-Bridgman法 红外透过率 电阻率 位错 

分 类 号：TN304[电子电信—物理电子学]