相位调制阵列结构微型光谱仪的设计与仿真实验研究  

Design and simulation of phase-modulation array structure micro-spectrometer

作　　者：杨涛[1,2] 李伟[1] 何浩培[2] 

机构地区：[1]南京邮电大学信息材料与纳米技术研究院,江苏南京210046 [2]香港中文大学电子工程学系

出　　处：《光电子．激光》2012年第5期824-831,共8页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金青年科学基金(61106116);国家自然科学面上基金(51172110);国家重点基础研究发展计划(2009CB930600);江苏省自然科学基金(BK2010252);江苏省高校自然科学面上基金(10KJB510017);香港中文大学科研基金(2050459);香港科技大学联合研究基金(HKDST2107C)资助项目

摘　　要：介绍了一种相位调制阵列结构微型光谱仪。光谱仪的核心部件为构建在CCD或CMOS上的微型干涉仪二维阵列,阵列中的各个微型干涉仪由不同高度的PMMA台阶组成。待测光入射后,会在各个微型干涉仪下方形成不同的干涉光强分布。通过CCD或CMOS的像素元测量每个微型干涉仪下方的干涉光功率,所得数据可组成一个线性方程组,由Tikhonov正则化方法解此方程组可复原光谱。仿真实验结果显示,光谱仪的光谱测量波长范围至少覆盖从300nm到1 100nm的波段,光谱测量的波长分辨率达到皮米量级。与传统光谱仪相比,该光谱仪具有体积小、成本低、分辨率高、光谱测量范围宽、测量时振动因素影响较小和可实时测量等优点。可以预计它将在航天遥感遥测、地质矿藏勘探、环境监测和生物细胞检测等领域有着广阔的应用前景。A micro-spectrometer based on phase-modulation array structure is presented in this paper.The core component of the spectrometer is a 2-dimensional（2D） array of miniature interferometer which is mounted on an imaging device such as CCD or CMOS.A series of steps made from PMMA construct each interferometer.When the ncident light illuminates the surfaces of the interferometer,the 2D intensity distribution obtained by the imaging device can be described by a system of simultaneous linear equations.One can readily recover the spectral contents of the input radiation by solving the equation system with Tikhonov regularization.The simulation results show that the detection range covers a wide spectrum from 300 nm to 1 100 nm and the wavelength resolution reaches picometer order.In comparison with conventional spectrometers,the new spectrometer has advantages of small size,low cost,high spectral resolution,wide detection range,vibration resistance and real-time operation,which may find wide applications,such as space remote sensing,geological mineral exploration,environmental monitoring,biological detection and so on.

关 键 词：微型光谱仪 干涉仪二维阵列 光谱复原 

分 类 号：TH744.1[机械工程—光学工程]