SR-XRD和EXAFS研究Mn掺杂ZnO薄膜的微观结构  

SR-XRD and EXAFS study on microstructure of Mn doped ZnO films

作　　者：张斌[1] 李敏[1] 王建中[1] 施立群[1] 承焕生[1] 杨铁莹[2] 文闻[2] 胡凤春[3] 

机构地区：[1]复旦大学现代物理研究所,上海2000433 [2]中国科学院上海应用物理研究所,上海201204 [3]中国科学技术大学国家同步辐射实验室,合肥230029

出　　处：《核技术》2012年第5期321-325,共5页Nuclear Techniques

基　　金：国家自然科学基金(10775033;11075038);上海市重点学科建设项目资助(B107)

摘　　要：用射频磁控溅射技术在蓝宝石衬底上制备了一组不同衬底温度的Mn掺杂ZnO薄膜。质子激发X射线荧光(PIXE)测量表明,薄膜中仅有含量为5 at.%的Mn,未见其它磁性杂质元素(如Fe、Co、Ni等)。同步辐射X射线衍射(SR-XRD)表明,这些Mn掺杂ZnO薄膜具有纤锌矿ZnO结构。SR-XRD和扩展X射线吸收精细结构谱(EXAFS)分析显示,薄膜中未发现Mn团簇或MnO、MnO2、Mn2O3、Mn3O4等二次相,Mn原子是通过替代Zn原子而进入了ZnO晶格。Mn-doped ZnO films were prepared by radio frequency magnetron sputtering on sapphire substrate at different temperatures.They contained Mn of 5 at.%,without any magnetic impurities of Fe,Co and Ni,as were revealed by proton induced X-ray emission（PIXE）.Synchrotron radiation X-ray diffraction（SR-XRD） showed that the ZnO：Mn films possessed the wurtzite ZnO structure.No precipitates such as Mn cluster or MnO,MnO2,Mn2O3,and Mn3O4were observed by SR-XRD and fluorescence extended X-ray absorption fine structure spectra（EXAFS） in ZnO：Mn films.EXAFS analysis also showed that Mn atoms were incorporated into ZnO crystal lattice by occupying the sites of zinc atoms.

关 键 词：同步辐射X射线衍射 扩展X射线吸收精细结构谱 Mn掺杂ZnO薄膜 微观结构 

分 类 号：O722.8[理学—晶体学] O472.5