微型平面式气体火花开关的设计和制作  

Design and fabrication of micro planar gas spark switch

作　　者：周镇威[1] 杨卓青[1] 丁桂甫[1] 陆闻静[1] 沈慧[1] 

机构地区：[1]上海交通大学微米/纳米加工技术重点实验室,上海200240

出　　处：《强激光与粒子束》2012年第5期1256-1260,共5页High Power Laser and Particle Beams

基　　金：微米/纳米加工技术重点实验室基金项目(9140C790302110C7906)

摘　　要：基于表面微加工技术,设计并制作了一种微型平面式气体火花开关,其尺寸仅为1.5cm×0.5cm,对制作的微型火花开关进行电路测试,得到其输出电流峰值约为3 450A,上升时间164ns。结合实验结果,对开关器件进行电路系统仿真并提取参数,得到系统电感为26.5nH,电阻为0.066Ω,与传统机械结构的立体式火花开关相比,器件参数得到显著优化。For single-use and cost-effective pulsed power system such as exploding foil initiators,a micro planar gas spark switch is designed and fabricated based on microfabrication.The size of the switch is only about 1.5 cm×0.5 cm.Device testing of the switch gives an output of peak current 3 450 A and rise time 164 ns,which satisfies the demand of exploding foil initiators and ordinary pulsed power systems.System modeling based on experimental data shows that the inductance and resistance of the switch circuit are 26.5 nH and 0.066 Ω,respectively.Compared with the conventional stereo spark gap switch,the parameters of the device are greatly optimized.

关 键 词：火花隙开关 脉冲功率 微型平面化 微机电集成制造 

分 类 号：TN782[电子电信—电路与系统]