面向半导体设备的Interface A通信方法研究  

Research on communication method of interface a for semiconductor equipment

作　　者：叶家发[1,2] 刘明哲[2] 

机构地区：[1]中国科学院研究生院,北京100039 [2]中国科学院沈阳自动化研究所,沈阳110016

出　　处：《机械设计与制造》2012年第5期273-275,共3页Machinery Design & Manufacture

基　　金：国家科技重大专项项目(2009-10)

摘　　要：针对半导体设备工厂自动化的设备数据采集需求,给出了一种基于Interface A标准的通信方法,该方法构造了设备的通用模型,设计了设备通信的安全认证和授权机制,并给出了采集设备实时数据的方法,可满足工厂自动化系统对半导体设备的数据采集和设备控制需求。According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation,this paper present a communication solution based on SEMI Interface A standards.The method,constructing the common equipment model of semiconductor equipment,designing secure authentication and authorization mechanisms,and giving way to real-time data acquisition,would meet the requirement of equipment data acquisition and control for semiconductor equipment in the factory automation.

关 键 词：半导体设备 INTERFACE A 数据采集 工厂自动化 

分 类 号：TH16[机械工程—机械制造及自动化]