微机电系统光学组件的系统级建模  

System-level modeling for MEMS optical components

作　　者：李晓莹[1] 李慧敏[1] 常洪龙[1] 何洋[1] 焦文龙[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072

出　　处：《光学精密工程》2012年第5期1069-1075,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划(MEMS重大专项)资助项目(No.2007AA04Z347;No.2009AA04Z320)

摘　　要：为提高微机电系统(MEMS)中光学系统整体仿真的准确性和效率,解决光学组件系统级建模存在的问题,提出了一种光学组件系统级建模方法,该方法可同时支持与MEMS系统级机械组件和电路组件共同仿真。首先,介绍了多端口组件网络方法、高斯光束特点和空间坐标系变换理论。接着,以微平面镜为例,介绍了光学组件系统级建模方法的流程。最后,采用Verilog-A硬件描述语言建立了包含多个典型光学组件的系统级光学库。使用该库的光学组件在MEMS集成设计工具MEMS Garden中搭建微扫描系统进行了仿真与测试。与商业软件CoventorWare的分析结果相比,提出的建模方法解决了扫描盲区问题,且非差分电压分析的误差小于3%。结果显示,本文提出的建模方法精确有效,对MEMS的系统级设计有参考价值。To improve the accuracy and efficiency of the simulation for the optical system in a Micro-electro-mechanical System（MEMS） and to overcome the difficulties in the system-level modeling of MEMS optical components,a system-level modeling method was proposed to support the co-simulation for MEMS system-level mechanical components and electrical components.First,the modeling methodology of Multi-Port-Element Network（MuPEN）,the characteristics of Gaussian beam and the theory of space coordinate transformation were introduced.Then,the modeling process of a micro-mirror was given to explain the modeling method of all optical components.Finally,using the hardware description language of Verilog-A,an optical library including some typical components was established.The non-differential voltage simulation results of the system-level scanning system were compared with those of CoventorWare and results show that the scanning system in former environment can eliminate the blind area,and the maximum error is within 3%.It indicates that the proposed modeling method for optical components could work effectively and accurately,and the study is significant value to the MEMS system-level design.

关 键 词：微机电系统(MEMS) 光学组件 建模 Verilog-A硬件描述语言 

分 类 号：TH703[机械工程—仪器科学与技术] TP391[机械工程—精密仪器及机械]