考虑负载补偿的脉冲溅射电源的设计与实现  

Design and Implementation of Pulsed Magnetron Sputtering Power Supply Considering Load's Compensation

作　　者：邵桂荣[1] 苏世栋[1] 畅福善[1] 

机构地区：[1]运城学院,物理与电子工程系,山西运城044000

出　　处：《电力电子技术》2012年第5期25-27,共3页Power Electronics

基　　金：运城学院研究项目(JC-2009014);山西省高等学校科技开发项目(20101124)~~

摘　　要：脉冲磁控溅射电源是实现绿色磁控溅射镀膜的关键设备之一,而等离子体负载的非线性特性会直接影响电源的输出性能。此处以TMS320LF2407型DSP芯片为主控制器,研制一款数字化的脉冲磁控溅射电源,介绍了电源的总体设计方案,主电路拓扑结构及控制电路设计思路,设计了电感、电阻及电容的负载补偿电路,该电路有效解决了由于等离子体负载的非线性特性而引起的脉冲电压振荡与上升时间之间的矛盾。系统测试和运行结果证明了电源设计方案的正确性,且电源表现出良好的负载适应能力。Pulsed magnetron sputtering power supply is one of the key equipment to achieve the green magnetmn sputtering coating, however,the nonlinear characteristic of plasma load directly affects power＇s performance.A digital power based on DSP TMS320LF2407 as main controller is designed and developed.The overall design of power sup- ply,the main circuit topology and control circuit are introduced.A load compensation circuit consisting of inductance, resistance and capacitance is designed, which effectively solve the contradiction between pulsed voltage＇s oscillation and rise time because of the plasma load＇s nonlinear characteristics.At last,the system test and operation results show that the correctness of the power supply design, and the power has a good load adaptability.

关 键 词：电源 等离子体负载 补偿电路 

分 类 号：TN86[电子电信—信息与通信工程]