制备多模聚硅氧烷光波导关键技术的改进  

Improvement of the technology of making multi-mode polysiloxane waveguides

作　　者：温昌礼 季家镕[2] 窦文华[2] 冯向华[2] 徐蓉 门涛 刘长海 

机构地区：[1]宇航动力学国家重点实验室,西安710043 [2]国防科学技术大学光电科学与工程学院,长沙410073

出　　处：《物理学报》2012年第9期207-212,共6页Acta Physica Sinica

基　　金：国家高技术研究发展计划(批准号:2007AA01Z2a5)资助的课题~~

摘　　要：本文利用浇铸法,使用M&N胶和OE6450两种聚硅氧烷制备光波导.通过改进制备光波导的多个关键技术,解决了波导制备过程中的气泡问题、脱模问题、芯层不固化问题、芯层和覆盖层产生化学反应等难题,提出了比较完备和科学的聚硅氧烷波导制备工艺流程,从而使得波导的制备成品率从原来低于40%提高到高于80%,波导的最大长度从原来的21 cm增加到22.5 cm,波导的损耗(截断法测量结果)从最初的0.3dB/cm(850 nm)降低到了0.21dB/cm(850nm).本文在波导制备技术方面具有重要的实际意义和价值.In this paper, we present an improved technology of making multi-mode polysiloxane waveguides. Through this kind of improve- ment, we can solve these problems such as reducing the number of air bubbles, demoulding, uncuring of the core layer, the chemical reaction between the core layer and the cover layer, etc. Finally, more than 80% of waveguides made by us can be successful, but before the improvement of the technology we can only have less than 40% successful waveguides. The longest waveguides can be 22.5 cm in length, compared with the 21 cm of previous ones. The propagation loss of the waveguides is 0.21 dB/cm （850 nm） by cutting back method, but before the improvement we can only have a loss of 0.3 dB/cm （850 nm）. So the improvement of the technology is important in optical waveguides making.

关 键 词：光学设计 多模脊形波导 聚硅氧烷 浇铸法 

分 类 号：TN252[电子电信—物理电子学]