溅射条件对湿敏薄膜特性的影响  

Effect of Sputtering Condition on Feature of Humidity Sensing Film

作　　者：孙承松[1] 温作晓[1] 魏永广[1] 关艳霞[1] 周立军[1] 

机构地区：[1]沈阳工业大学,辽宁沈阳110023

出　　处：《真空》2000年第2期13-15,共3页Vacuum

摘　　要：本文介绍了 RF溅射制备湿度敏感膜技术 ,讨论了衬底温度、工作气体及压力、放电电压及时间对湿敏膜感湿特性的影响。实验结果表明 。The technology of humidity sensing film of RF sputtering manufacture is introduced in this article, discussing the effect of substrate temperature, working gas, working pressure, discharge voltage and discharge time on feature of humidity sensing film. The result of experiment demonstrated time humidity sensing film of good humidity sense can be made under seriously control the above factors.

关 键 词：溅射 特性 湿敏薄膜 湿敏元件 

分 类 号：TN305.92[电子电信—物理电子学]