硅压阻传感器的智能温度补偿研究  

Silicon Piezoresistive Sensor ' s Intelligent Temperature Compensation

作　　者：胡辽林[1] 刘晨[1] 盖广洪[2] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048 [2]中国航天科技集团公司第44研究所,西安710025

出　　处：《传感技术学报》2012年第4期468-471,共4页Chinese Journal of Sensors and Actuators

基　　金：陕西省教育厅科学研究计划项目(2010JK716)

摘　　要：针对硅压阻传感器存在的温度漂移问题,采用MAX1452信号调理芯片设计了一个智能温度补偿系统。该系统包括硬件和软件两部分,一次可以补偿8只传感器。对补偿前后进行了测试,结果表明系统工作稳定可靠,在-40℃～80℃下精度达到0.2%。For silicon piezoresistive sensor＇s temperature drift problem, an intelligent temperature compensation system was designed by adopting MAX1452 signal conditioning chip. The system includes hardware and software and it can compensate 8 sensors once a time. The system performance tests of pre-compensation and post-compensation are made under different temperature and different pressure. The results show that the designed system is reliable, sensor＇s error from temperature is reduced obviously after compensation and the precision is achieved within 0.2%.

关 键 词：硅压阻传感器 温度漂移 智能补偿 MAX1452 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TP212.6[自动化与计算机技术—控制科学与工程]