阿贝原则再认识  

Re-visit to the Abbe principle

作　　者：石照耀[1] 张斌[1] 费业泰[2] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124 [2]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《仪器仪表学报》2012年第5期1128-1133,共6页Chinese Journal of Scientific Instrument

基　　金：国家"高档数控机床与基础制造装备"科技重大专项(2010ZX04014-091);国家自然科学基金科学仪器专项(50627501);北京市教委创新人才项目(PHR201006104)资助项目

摘　　要：为探究阿贝原则在现代超精密制造和测量中的适应性,回顾了古典阿贝原则及其扩展,剖析了要素布局产生的一次误差,研究了二维长度测量中的阿贝原则。通过分析测量系统的标准量、被测量、瞄准点、读数点、导向面5个要素的不同布局产生的误差,发现当标准量和被测量按经典阿贝原则要求处于同一条直线上,而其余要素不在这条直线上时,也会产生一次误差。提出了瞄准共线、读数共线、导向共线以及阿贝臂误差、瞄准臂误差、读数臂误差、导向臂误差和阿贝综合误差等概念。揭示了阿贝原则的隐含条件,重新表述了阿贝原则。讨论了上下堆叠式和共平面式二维结构的阿贝原则适应性,提出了一种提升工具显微镜精度的简明方案,介绍了一种减小阿贝误差的共平面二维精密工作台。对阿贝原则的再认识,可更新设计理念,用于研制超精密仪器和机械,也可用于经典量仪的精度再提升。To explore the adaptability of the Abbe principle in modern ultra-precision manufacturing and measurement,the Abbe principle and its extension are reviewed,the first order errors due to the configuration of the elements are analyzed,and the Abbe principle for two dimensional length measurement is discussed.Through analyzing the errors generated by the different configurations of five elements such as reference,measurand,sensing point,reference point and guiding surface,it is discovered that the first order errors are found when the sensing point,reference point and guiding surface are not in the same line while the reference and measurand are collinear as the Abbe principle requires.The concepts of collinear sensing point,collinear reference point and collinear guiding surface are presented,and the Abbe offset error,sense offset error,reference offset error,guiding offset error and Abbe comprehensive error are defined.The implied conditions of the Abbe principle are revealed,and a new statement of Abbe principle is presented.The adaptability of the Abbe principle in stack-up and co-planar two dimensional structures is discussed.As applications,a concise structure for improving the accuracy of tool microscopes is proposed,and a co-planar two dimensional precision stage is introduced in which the Abbe error is reduced.Through re-understanding the Abbe principle,it is possible to update the design philosophy for the design of new ultra-precision instruments and machinery,and for the upgrade of typical metrology instruments.

关 键 词：阿贝原则 一次误差 阿贝误差 二维阿贝原则 

分 类 号：TB92[一般工业技术—计量学]