基于免形状测量模式的复杂形状测量机设计  

Design of measuring machine for complex geometry based on form-free measurement mode

作　　者：石照耀[1] 张斌[1] 林家春[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《仪器仪表学报》2012年第6期1377-1384,共8页Chinese Journal of Scientific Instrument

基　　金：国家"高档数控机床与基础制造装备"科技重大专项(2010ZX04014-091);国家自然科学基金科学仪器专项(50627501);北京市教委创新人才项目(PHR201006104)资助

摘　　要：为了高精度高效率地测量数学模型未知的复杂几何形状,介绍了"免形状测量模式",分析了该测量模式对仪器的基本要求,基于该模式设计了一台移动工作台式测量机。测量机以直线电机为驱动元件,以高精度长光栅为测量元件。为减小被测件重量对测量机的影响,设计了封闭式真空负压的空气静压气浮导轨和共平面的H形二维结构。设计了具有制动功能的Z轴和气浮隔振等关键部件。仪器量程为300 mm×300 mm×300 mm,测量不确定度为1.8μm,能测量数学模型未知的复杂几何形状。To measure complex geometries without nominal mathematics models, a ＂form-free measurement mode＂ is introduced, and its basic requirements for measuring machine are analyzed. A fixed column structure coordinate measuring machine with high accuracy and efficiency was designed based on the novel mode. The machine is driven by linear motors, and high accuracy gratings are used as measurement devices. To decrease the influence of workpiece weight, a closed aerostatic bearing with vacuum preload and an H style two dimensional co-planar structure are designed. A pneumatic cylinder balanced axis Z assembly with brake function is designed, and a vibration isolation assembly is also designed. The measurement span of the machine is 300 mm× 300 mm × 300 mm and the measurement uncertainty is 1.8 μm. It can be applied to measure complex geometries without nominal mathematics models.

关 键 词：免形状测量 气浮导轨 共平面结构 直线电机 

分 类 号：TB92[一般工业技术—计量学]