小角X射线衍射技术在TiAlN涂层中的应用  

APPLICATION OF GRAZING INCIDENT X-RAY DIFFRACTION TECHNIQUE IN TiAlN COATING

作　　者：胡明媚[1] 朱丽慧[1] 倪旺阳 刘一雄 

机构地区：[1]上海大学材料科学与工程学院,上海200072 [2]Kennametal Inc．,Latrobe Pennsylvania 15650,USA

出　　处：《上海金属》2012年第3期23-25,32,共4页Shanghai Metals

摘　　要：主要采用常规X射线衍射法(XRD)和小角X射线衍射法对微米级厚度的Ti0.5Al0.5N涂层分别进行了物相检测、晶格常数计算和残余应力测定,并对测量结果进行了比较。结果表明:常规XRD法得到的图谱中基体信息强,而小角XRD法排除了基体衍射峰的干扰,更好地反映出TiAlN涂层信息;与常规XRD相比,小角XRD技术能显著降低晶格常数测量误差,有效测定TiAlN涂层的残余应力值。The methods of traditional X-ray diffraction （XRD） and grazing incident X-ray diffraction were used to characterize the phase assembly, lattice parameter and residual stress of Ti0.5- A10 5 N coating with micro grade thickness. Results showed that the diffraction peaks of substrate was much stronger than those of coating in the XRD pattern obtained by traditional XRD technique, whereas more information about the coating was reflected by means of grazing incident XRD technique. Comparing with traditional XRD, grazing incident XRD technique greatly improved the measurement accuracy of lattice parameter and effectively measured the residual stress of TiAlN coating.

关 键 词：TIALN涂层 小角X射线衍射 物相检测 晶格常数 残余应力 

分 类 号：TG714[金属学及工艺—刀具与模具]