溶胶-凝胶法制备SiO_2/TiO_2多层膜的研究  

Preparation and Study of TiO_2-SiO_2 Multilayer Film

作　　者：朱永安[1] 陈碧芳[1] 

机构地区：[1]嘉兴学院数理与信息工程学院,浙江嘉兴314001

出　　处：《嘉兴学院学报》2012年第3期70-74,共5页Journal of Jiaxing University

摘　　要：通过对溶胶、热处理温度以及溶胶-凝胶过程中反应和存放的环境温度及湿度等参数的调整,研究了在实验室条件下制备SiO2/TiO2多层膜的方法.已制备出折射率可调的溶胶,所镀制的SiO2薄膜折射率在1.18～1.41之间可调,TiO2薄膜折射率在1.80～2.20之间可调.采用椭偏仪、红外分光光度计、紫外-可见分光光度计等对所制得的多层膜的性能进行了研究,结果表明,实验条件对SiO2/TiO2多层膜的制备非常重要.Under the laboratory condition, methods for the preparation of SiO2/ TiO2 multilayer film were studied, based on parameter adjustments for sol, heat storage environment such as temperature and humidity. treatment temperature, sol--gel process response and Sol with variable refractivity has been prepared, and the refractive index of SiO2 thin films could be adjusted from 1.18 to 1.41, while the refractive index of TiO2 film could be adjusted from 1.80 to 2.20. The muhilayer film properties were studied by ellipsometer, infrared spec- trophotometer, UV--visible spectrophotometer and so on. Results show that the experiment conditions are very important for the preparation of SlOe/ TiO2 multilayer film.

关 键 词：溶胶-凝胶 SiO2/TiO2多层膜 制备 

分 类 号：TB383[一般工业技术—材料科学与工程]