形核密度对CVD金刚石涂层附着性能的影响  

Effects of the nucleation density on the adhesion property of CVD diamond coating

作　　者：邓福铭[1] 吴学林[1] 赵晓凯[1] 

机构地区：[1]中国矿业大学(北京)超硬刀具材料研究所,北京100083

出　　处：《超硬材料工程》2012年第2期1-4,共4页Superhard Material Engineering

基　　金：国家自然科学基金(No.51172278);科技人员服务企业行动计划项目(2009GJA00033);北京市教委共建项目(2010-583)

摘　　要：采用热丝化学气相沉积法(HFCVD)在硬质合金基体上进行金刚石的形核生长,使用扫描电镜(SEM)对金刚石涂层形核情况进行分析,研究了不同形核密度对CVD金刚石涂层附着力的影响。结果表明:当碳源浓度达到3%时,表面形核密度最高,约为107/cm2;浓度增大为4%时,形核密度降低。通过压痕实验对比分析得出形核工艺中碳源浓度为3%时沉积的金刚石涂层压痕最浅,压痕直径最小,金刚石涂层具有良好的附着性能。Nucleation and growth of diamond were conducted on cemented carbide substrate via hot filament chemical vapor deposition { HFVCD}. The diamond nucleation density were investigated by scanning electron microscope { SEM}, the influences of different nucleation density on CVD diamond coating adhesion were studied. The results show that the nucleation density reaches highest when the carbon concentration is 3% with density about 107/cm2, while the nucleation density is quite low as carbon concentration is higher than 3%. By analyzing the compression test, with the 3% carbon concentration in the nucleation process, the indentation of diamond coatings is the shallowest with minimum diameter, which has better adhesion properties.

关 键 词：化学气相沉积(CVD) 金刚石涂层 硬质合金 形核密度 

分 类 号：TB30[一般工业技术—材料科学与工程]