YBCO超导薄膜进氧脱氧过程的原位X射线衍射研究  

In-Diffusion and Out-Diffusion of Oxygen in C-Axis-Oriented YBa_2Cu_3O_(6+x) Film, Studied by in Situ X-Ray Diffraction

作　　者：金学军[1] 李力[2] 

机构地区：[1]上海交通大学材料科学与工程学院,上海200030 [2]中国科学院上海冶金研究所,上海200050

出　　处：《功能材料》2000年第3期271-272,共2页Journal of Functional Materials

摘　　要：用原位X射线衍射法研究了磁控溅射c取向YBa2 Cu3 O6+x/SrTiO3 (YBCO/STO)优质超导外延膜在 3 2 5℃氧气中的进氧过程和氮气中的脱氧过程。研究表明 ,薄膜的进氧和脱氧过程快慢相当 ,进脱氧过程都由氧扩散控制。Both in-diffusion in O 2 and out-diffusion in N 2 of oxygen at 325℃ in c-axis-oriented YBa 2Cu 3O 6+x film,deposited on single-crystal (100) SrTiO 3 by direct current sputtering,were studied by in situ X-ray diffraction on a Rigaku D/Max-RB diffractometer.The accordance between in-diffusion in O 2 and out-diffusion in N 2 was found,and both kinetic courses were conformed with the solution of the J. S. Fisher's diffusion equation in this case.So it was concluded that in two courses,diffusion was the controlling course and neither the barrier energy for chemical adsorption nor that for desorption was larger than the activation energy for diffusion of oxygen in the film at that temperature.

关 键 词：YBCO薄膜 氧扩散 原位X射线衍射 

分 类 号：TM262.06[一般工业技术—材料科学与工程]