基于电容电感移相单元的MEMS移相器  

MEMS phase shifter based on capacitance-inductance phase shift units

作　　者：刘泽文[1] 李玲[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《清华大学学报（自然科学版）》2012年第5期715-719,共5页Journal of Tsinghua University(Science and Technology)

摘　　要：为减小基本结构开关线型微机电(MEMS)移相器的面积,提出了一种新型的基于电容电感移相单元的小型化3位开关线型MEMS移相器。该移相器用MEMS工艺制成的交叠结构的电容电感移相单元代替原始的延迟传输线,其90°移相单元的长度比传统90°延迟线的缩短近3/4,45°移相单元的长度比原始延迟线的缩短近1/2,有效缩小了移相器的整体面积。用HFSS(high frequency structuresimulator)软件进行了仿真及优化设计。仿真结果表明:在20GHz到40GHz频段内,45°移相单元的回波损耗优于-27.25dB,插入损耗优于-0.33dB;90°移相单元的回波损耗优于-26.25dB,插入损耗优于-0.51dB。在35GHz时,整个3位移相器能够完成0～360°、间隔为45°的移相,平均插入损耗为-2.63dB,回波损耗优于-15dB,平均相位误差为3.67°。根据仿真结果,所设计的MEMS移相器适用于35GHz小型化相控阵雷达。A miniature 3-bit switched-line microelectromechanical systems（MEMS） phase shifter was developed based on capacitance-inductance phase shift units to reduce the size of traditional switched-line phase shifters.A micromachined overlap capacitor-inductor structure replaces the traditional transmission line.The 90° phase shift unit is one fourth the size of the traditional 90° transmission line（t-line） while the 45° phase shift unit is half the size of the a traditional 45° t-line.The design was simulated and optimized using Ansoft high frequency structure simulator（HFSS） software.For the 45° phase shift unit,the simulations show that the return loss is better than-27.25 dB and the insertion loss is better than-0.33 dB from 20 GHz to 40 GHz.For the 90° phase shift unit,the return loss is better than-26.25 dB and the insertion loss is better than-0.51 dB.The 3-bit phase shifter provides full 360° phase control at intervals of 45° at 35 GHz.The average insertion loss and the return loss are-2.63 dB and-15 dB and the average phase error is 3.67°.The designed MEMS phase shifter is suitable for miniature phased array radars operating at 35 GHz.

关 键 词：微机电(MEMS)移相器 开关线型 电容电感移相单元 小型化 

分 类 号：TN623[电子电信—电路与系统]