微型流量传感器研究  

Study on the Mini-flow Sensors

作　　者：姚爱琴[1] 马忠亮[2] 马铁华[1] 

机构地区：[1]华北工学院电子工程系 [2]华北工学院化学工程系,山西太原030051

出　　处：《华北工学院测试技术学报》2000年第1期25-28,共4页Journal of Test and Measurement Technology

摘　　要：目的　研究微型管道的流量测量技术 .方法　采用热膜技术 ,在石英玻璃棒上镀一层铂电阻膜 ,利用激光将铂膜蚀刻成特定的形状 ,形成 4个独立的铂电阻 ,并构成一基本的电桥 ,电桥通以一定的电流后产生热量 ,由于液体流动的作用会使 4个铂电阻间产生一定的温差 ,从而导致电桥失衡 ,产生一定的输出电势 .结果　研制出的流量传感器的各项技术指标满足设计要求 .结论　微型流量传感器与传统的传感器相比 ,在性能上有了较大的提高 。Aim\ To study the measuring technology of the flow in a miniature conduit. Methods\ The flow in a miniature conduit is measured by a new type of mini flow sensors, on which the heat film technology is adopted. A thin coat of platinum is plated on quartz glass bar and etched into specific shape by laser, to form four independent resistances, of which a fundamental electric bridge is composed, the flowing of the tested fluid moves partial of the heat produced by the bridge and makes each temperature of the four resistances different. This results in the unbalance of the electric bridge and production of output voltage. Results\ The sensor we developed fulfills the specification intented requirements. Conclusion\ With less of the pressure of flowing in conduit, the mini flow sensor performs better features than traditional flow sensors.

关 键 词：热膜 流量传感器 流量测量 微型管道 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH814[自动化与计算机技术—控制科学与工程]