真空紫外光源的研制与质量控制  

Basic Studies on the Factors Deciding Properties of VUV Light Source and the Examination Methods of VUV Radiation

作　　者：景士廉[1] 王谦[1] 马如森[1] 

机构地区：[1]中国科学院生态环境研究中心,北京100085

出　　处：《真空电子技术》2000年第1期6-14,共9页Vacuum Electronics

基　　金：国家自然科学基金资助项目 !批准号 2 9775 0 29

摘　　要：研究了决定真空紫外光源光谱、寿命,发光效率等基本因素,如工作气体,辐射能级,激发能量等参数的选择。给出并比较了检验真空紫外光源质量的方法和仪器,其中包括热电耦法、荧光法、光电流检测法等。使用基于上述研究和技术制造的光源装备的光离子化检测器,灵敏度达10.5C/g,(苯),检测极限为0.23pg(苯)。The fundamental properties of vacuum ultraviolet light (VUV) source,such as useful lifetime,emission spectrum,radiation intensity and so onare studied The effects of luminascence gases,energy levels,spectrum characteristics of the window materials on the performances of VUV source were discussed.The examination methods of VUV light source are introduced,i.e.the methods of thermocuple,fluorescence,the photoionization and photoelectric emission.The Specifications of the photoionization detector are improved by the VUV light source.The sensitylvity was 10.5 C/g (for benzene),the detection limit is 0.23 pg (for benzene).

关 键 词：真空紫外光源 质量控制 检测 

分 类 号：TN201[电子电信—物理电子学]