遗传算法在椭圆偏振测量中的应用  

Application of genetic algorithm in measurement with ellipsometer

作　　者：彭子龙 李佐宜[1] 胡煜[1] 谭立国[1] 杨晓非[1] 

机构地区：[1]华中理工大学电子科学与技术系,武汉430074

出　　处：《光学技术》2000年第3期277-280,共4页Optical Technique

摘　　要：详细介绍了椭圆偏振法测量的基本原理和椭偏函数方程的建立 ,将遗传算法引入到椭偏法测试薄膜的折射率和厚度的计算中 ,改善了计算的收敛性并提高收敛速度。给出了计算程序流程图 ,重点分析了各遗传算子的设计。The principle of the ellipsometer and the founding of the elliptic function were described detailedly. The genetic algorithm (GA) was introduced to calculate the refraction and thickness of sample measured by ellipsometer, which greatly ameliorated the convergence of computation and elevated the convergent speed. The GA calculating framework was presented and the stratage for GA was amply analyzed and a special software was developed.

关 键 词：椭偏仪测量 遗传算法 椭圆偏振测定 薄膜光学 

分 类 号：O484.5[理学—固体物理]