激光冲击效应下的力学电化学微细刻蚀加工  

Mechanical-electrochemical micro-etching under laser shock effect

作　　者：张朝阳[1] 李中洋[1] 王耀民[1] 毛卫平[1] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《光学精密工程》2012年第6期1310-1315,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.50975127);教育部博士点新教师基金资助项目(No.20093227120006);江苏省自然科学基金资助项目(No.BK2011522);中国博士后基金特别资助项目(No.201003558)

摘　　要：在所构建的纳秒脉冲激光电化学加工系统中,利用激光辐照和脉冲电化学刻蚀复合的方法对铝合金进行了加工试验,研究了激光穿过溶液作用于物质时产生的力效应和电化学效应对加工质量的影响。试验结果表明:高能脉冲激光透过电解液辐照在工件表面时,激光在电解液中产生的冲击波力效应和射流冲击力效应会使工件发生弹性变形,从而改变电极电势,提高电流密度,加速了对工件的刻蚀。激光产生的力效应能够去除加工区的钝化层,使其发生电化学反应,而非加工区不发生反应,从而显著增强了电化学的定域蚀除能力。最后,利用力学电化学效应,在浓度为0.5mol/L的NaNO3溶液中实现了线宽140μm左右、深宽比较大的微细刻蚀加工,获得了较好的加工质量和成形精度。An aluminum alloy workpiece was etched by a compound processing of laser and electro chemistry in an experimental system established, and the influence of mechanic effect caused by a laser shock and an electrochemical effect on the process quality was investigated . The results show that when a highenergy pulsed laser irradiates on the metal workpiece in the solution, it will take the elas tic deformation by the jet impact and the shock wave force caused by the laser. Under the stress of the laser shock wave,the potential electrode is changed, current density is increased, and the electrochem ical corrosion of metallic materials is accelerated. Moreover, the mechanics effect of laser shock could remove the passivation layer on the workpiece surface irradiated by the laser, and the material at this zone is eroded and removed. However, the other zone material could not be corroded with the protec tion of the passivation layer, which enhances the locally etching ability of electrochemical machining significantly. Finally, the compound machining of the laser shock and electrochemical corrosion was used to achieve a microetching with a high aspect ratio and a line width of 140/~m in the NaNO3 solu tion with a concentration of 0.5 mol/L, which obtains good processing quality and satisfactory shaping precision.

关 键 词：脉冲激光 激光冲击 电化学刻蚀 力学电化学效应 复合加工 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]