用飞切法加工光学晶体平面镜  

MACHINING OF OPTICAL CRYSTAL MIRROR BY FLY CUTTING METHOD

作　　者：史国权[1] 仇健 于骏一[2] 马文生[3] 韩荣久[3] 黄巍 

机构地区：[1]长春光学精密机械学院精密机械工程系,长春130022 [2]吉林工业大学 [3]中国科学院长春光学精密机械研究所

出　　处：《机械工程学报》2000年第3期73-77,共5页Journal of Mechanical Engineering

摘　　要：从单晶锗光学晶体结构入手，深入分析了光学晶体材料切屑切除与晶体结构方位的关系，确定了材料产生剪切滑移的最佳晶向，据此提出了在这些晶向上对单晶锗进行飞切加工的新工艺，从而有效地消除了已加工表面断裂破坏区，获得了表面粗糙度０．００７～０．００９均匀一致的光滑表面。On the basis of the study on the crystal structure of single crystal germanium, the relationship between the chip removal of optical crystal material and crystal orientation is fully analyzed. The optimum directions of shear slip are determined, the fly cutting method of single crystal germanium is put forward in the most favorable cutting directions. The cleavage fracture zones on the machined surface are eliminated completely with fly cutting and the homogeneous smooth surface of roughness value of 0.007-0.009 is obtained

关 键 词：单晶锗 光学晶体 飞切加工 表面粗糙度 

分 类 号：TN304.11[电子电信—物理电子学]